کنترل موقعیت یک عملگر الکترواستاتیک سیستم میکروالکترومکانیکی درحضور عدم قطعیت‌ها

Microelectromechanical systems are the technology of very small systems in micrometer dimensions. Microelectromechanical systems have been the subject of many research in the past 50 years and have led to the development of various devices in many fields such as biomedicine, automotive, and robotics. It has been recognized that a saddle-node bifurcation, called the pull-in, causes instability and operational limitations in electrostatic actuators. The electrostatic actuator is actually the key that allows microelectromechanical systems to physically move. A famous type of operator in these systems is the parallel plane operator. In this research, we intend to help improve system performance and improve model reliability by using sliding mode control. There are some unknown parameters in this system that estimation of uncertainties is used for this problem. the simulation is compared with tow series of parameters, and the values ​​of each series have converged to desired values. The simulation graphs show that the proposed controller works well.